2016-Sustainable Industrial Processing Summit
SIPS 2016 Volume 11: Physics, Advanced/Multifunctional Materials, Composite, Quasi-crystals, Coating
| Editors: | Kongoli F, Marquis F, Lu L, Xia H, Masset P, Rokicki P |
| Publisher: | Flogen Star OUTREACH |
| Publication Year: | 2016 |
| Pages: | 180 pages |
| ISBN: | 978-1-987820-56-0 |
| ISSN: | 2291-1227 (Metals and Materials Processing in a Clean Environment Series) |
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Physical Properties of Electroformed Invar Fine Metal Mask
Y.B. Park1; I.G. Kim2; Y.J. Lee2;1SUNCHON NATIONAL UNIVERSITY, Suncheon, Korea (Republic of [South] Korea); 2, Suncheon, Korea (Republic of [South] Korea);
Type of Paper: Regular
Id Paper: 237
Topic: 20
Abstract:
The fine metal mask (FMM) used for the OLED deposition process was fabricated using an electroforming technique, by which Fe-Ni and Fe-Ni-P Invar alloy were electrodeposited on a patterned cathode and then peeled off from it. The coefficient of thermal expansion in the final product of FMM with a thickness of 7µm approached that of the commercially produced Invar alloy using the metallurgical method. The electroformed FMM consists of nanometer-sized grains ranging between 10 and 15 nm. In the Fe-Ni binary Invar electrodeposit, abnormal grain growth took place in heating beyond 380oC and resulted in the texture change from <100>//ND, the major component in the as-deposited state, to the strong development of <111>//ND. This microstructural change indicates a limit of thermal stability in the practical applications. Fe-Ni-P ternary Invar FMM fabricated by addition of phosphorus in electroforming exhibited higher thermal stability due to different microstructures.