Editors: | Kongoli F, Pech-Canul M, Kalemtas A, Werheit H |
Publisher: | Flogen Star OUTREACH |
Publication Year: | 2015 |
Pages: | 300 pages |
ISBN: | 978-1-987820-31-7 |
ISSN: | 2291-1227 (Metals and Materials Processing in a Clean Environment Series) |
In this paper, we have investigated the formation of Al-Mn alloy films and the effect of annealing on the structural. The Al1-xMnx thin films with different Mn concentration were prepared using a DC magnetron sputtering method.
The microstructures of as-deposited films were then compared to those observed after thermal annealing treatment in vacuum at 500A°C for 1 h. The alloys were characterized by Scanning Electron Microscopy (SEM) and X-ray diffraction (XRD)
The XRD results described above reveal the presence of amorphous structure for untreated samples with high concentrations of manganese and the transformation from the amorphous state to the crystalline one by annealing.
After the annealing treatment we have observed, at manganese concentration between 10 to 32 at.%, the phases predicted by the equilibrium diagram, such as Al, Al-Mn and A16Mn.
At higher manganese compositions (a‰ˆ 41 wt %) the metastable crystal structure of Al8Mn5 phase is obtained.