Editors: | Kongoli F, Pech-Canul M, Kalemtas A, Werheit H |
Publisher: | Flogen Star OUTREACH |
Publication Year: | 2015 |
Pages: | 300 pages |
ISBN: | 978-1-987820-31-7 |
ISSN: | 2291-1227 (Metals and Materials Processing in a Clean Environment Series) |
Low Temperature Cofired Ceramics (LTCC) such as zinc titanate with their low dielectric constant and low losses are receiving increasing attention in research community because of its application in novel multilayer communication modules involving the integration of passive components. However, zinc titanate is usually sintered at temperatures above 1100°C, which are higher than the melting temperatures of Ag (961°C) and Cu (1064°C) interconnects in multilayer devices. Therefore, sintering of zinc titanate ceramics at low temperatures becomes a requirement for usage in the devices. In the present experimental work, sintering of zinc titanate ceramics was carried out with combined additions of V2O5 and B2O3 in the range of 0.5 to 1 wt%. The individual oxide powders were mechanically milled, calcined before adding the sintering enhancers and further calcined before compacting. Sintering was carried out in air between 850 and 1100°C. The sintered samples were analyzed for their phase content, dielectric properties and sinterability. It was found that the zinc titanate ceramics with a maximum density of 4.75 g/cm3 at temperatures as low as 900°C with a dielectric constant of 18.5 and a reasonable Q x F of about 14000 GHz. The phase content of the ceramics showed small TiO2 but varied phases of zinc titanate depending on the sintering temperature.
Key Words: Zinc Titanate, V2O5, B2O3, Sintering, Dielectric Properties